We have performed and already published our investigation on the
superconductivity of Co and CoSi₂ thin films for applications
to quantum technology (Link to the related paper).

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  We have fabricated CoSi₂ based planar resonator lines using
  photolithography and RIE. Process steps were optimized for vertical
  side-walls and clean etching.
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  CoSi₂ based nano-bridge Josephson Junctions (JJ) were fabricated
  using Focused Ion Beam (FIB), optimized down to 100 nm × 100 nm.
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  Microwave measurements of CoSi₂ resonators will be performed to
  further optimize fabrication for high-quality factor resonators and kinetic inductance studies.
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  Electrical characterization of CoSi₂ nano-bridge JJs will be conducted
  to develop low-noise qubits by eliminating oxide-related TLS loss.
  SQUIDs using CoSi₂ nano-bridges will also be fabricated via FIB.
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  JJs with CoSi₂ electrodes and 2D materials such as MoS₂
  as tunnel barriers are planned under a parallel project.